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This paper aims to present the capacitance characterization of tapered dielectrophoresis (DEP) microelectrodes as micro-electro-mechanical system sensor and actuator device. The application of DEP-on-a-chip (DOC) can be used to evaluate and correlate the capacitive sensing measurement at an actual position and end station of liquid suspended targeted particles by DEP force actuator manipulation.

The capability of both, sensing and manipulation was analysed based on capacitance changes corresponding to the particle positioning and stationing of the targeted particles at regions of interest. The mechanisms of DEP sensor and actuator, designed in DOC applications were energized by electric field of tapered DEP microelectrodes. The actual DEP forces behaviour has been also studied via quantitative analysis of capacitance measurement value and its correlation with qualitative analysis of positioning and stationing of targeted particles.

The significance of the present work is the ability of using tapered DEP microelectrodes in a closed mode system to simultaneously sense and vary the magnitude of manipulation.

The integration of DOC platform for contactless electrical-driven with selective detection and rapid manipulation can provide better efficiency in in situ selective biosensors or bio-detection and rapid bio-manipulation for DOC diagnostic and prognostic devices.

The purpose of this paper is to visualize protein manipulation using dielectrophoresis (DEP) as a substantial perspective on being an effective protein analysis and biosensor method as DEP is able to be used as a means for manipulation, fractionation, pre-concentration and separation. This research aims to quantify DEP using an electrochemical technique known as cyclic voltammetry (CV), as albumin is non-visible without any fluorescent probe or dye.

The principles of DEP were generated by an electric field on tapered DEP microelectrodes. The principle of CV was analysed using different concentrations of albumin on a screen-printed carbon electrode. Using preliminary data from both DEP and CV methods as a future prospect for the integration of both techniques to do electrical quantification of DEP forces.

The size of the albumin is known to be 0.027 µm. Engineered polystyrene particle of size 0.05 µm was selected to mimic the DEP actuation of albumin. Positive DEP of the sample engineered polystyrene particle was able to be visualized clearly at 10 MHz supplied with 20 Vpp. However, negative DEP was not able to be visualized because of the limitation of the apparatus. However, albumin was not able to be visualized under the fluorescent microscope because of its translucent properties. Thus, a method of electrical quantification known as the CV technique is used. The detection of bovine serum albumin (BSA) using the CV method is successful. As the concentration of BSA increases, the peak current obtained from the voltammogram decreases. The peak current can be an indicator of DEP response as it correlates to the adsorption of the protein onto the electrodes. The importance of the results from both CV and DEP shows that the integration of both techniques is possible.

The integration of both methods could give rise to a new technique with precision to be implemented into the dialyzers used in renal haemodialysis treatment for manipulation and sensing of protein albumin.

The purpose of this paper is to use a particle velocity measurement technique on a tapered microelectrode device via changes of an applied voltage, which is an enhancement of the electric field density in influencing the dipole moment particles. Polystyrene microbeads (PM) have used to determine the responses of the dielectrophoresis (DEP) voltage based on the particle velocity technique.

Analytical modelling was used to simulate the particles’ polarization and their velocity based on the Clausius–Mossotti Factor (CMF) equation. The electric field intensity and DEP forces were simulated through the COMSOL numerical study of the variation of applied voltages such as 5 V p-p, 7 V p-p and 10 V p-p. Experimentally, the particle velocity on a tapered DEP response was quantified via the particle travelling distance over a time interval through a high-speed camera adapted to a high-precision non-contact depth measuring microscope.

The result of the particle velocity was found to increase, and the applied voltage has enhanced the particle trajectory on the tapered microelectrode, which confirmed its dependency on the electric field intensity at the top and bottom edges of the electrode. A higher magnitude of particle levitation was recorded with the highest particle velocity of 11.19 ± 4.43 µm/s at 1 MHz on 10 V p-p, compared to the lowest particle velocity with 0.62 ± 0.11 µm/s at 10 kHz on 7 V p-p.

This research can be applied for high throughout sensitivity and selectivity of particle manipulation in isolating and concentrating biological fluid for biomedical implications.

The comprehensive manipulation method based on the changes of the electrical potential of the tapered electrode was able to quantify the magnitude of the particle trajectory in accordance with the strong electric field density.

This paper aims to present the dielectrophoresis (DEP) force (FDEP), defined as microelectrofluidics mechanism capabilities in performing selective detection and rapid manipulation of blood components such as red blood cells (RBC) and platelets. The purpose of this investigation is to understand FDEP correlation to the variation of dynamic dielectric properties of cells under an applied voltage bias.

In this paper, tapered design DEP microelectrodes are used and explained. To perform the characterization and optimization by analysing the DEP polarization factor, the change in dynamic dielectric properties of blood components are observed according to the crossover frequency (f_xo) and adjustment frequency (f_adj) variation for selective detection and rapid manipulation.

Experimental observation of dynamic dielectric properties change shows clear correlation to DEP polarization factor when performing selective detection and rapid manipulation. These tapered DEP microelectrodes demonstrate an in situ DEP patterning efficiency more than 95%.

The capabilities of tapered DEP microelectrode devices are introduced in this paper. However, they are not yet mature in medical research studies for various purposes such as identifying cells and bio-molecules for detection, isolation and manipulation application. This is because of biological property variations that require further DEP characterization and optimization.

The introduction of microelectrofluidics using DEP microelectrodes operate by selective detecting and rapid manipulating via lateral and vertical forces. This can be implemented on precision health-care development for lab-on-a-chip application in microfluidic diagnostic and prognostic devices.

This study introduces a new concept to understand the dynamic dielectric properties change. This is useful for rapid, label free and precise methods to conduct selective detection and rapid manipulation of mixtures of RBC and platelets. Further, potential applications that can be considered are for protein, toxin, cancer cell and bacteria detections and manipulation. Implementation of tapered DEP microelectrodes can be used based on the understanding of dynamic dielectric properties of polarization factor analysis.

The purpose of this paper is to propose an alternative approach to improve the performance of microelectromechanical systems (MEMSs) silicon (Si) condenser microphones in terms of operating frequency and sensitivity through the introduction of a secondary material with a contrast of mechanical properties in the corrugated membrane.

Finite element method from COMSOL is used to analyze the MEMS microphones performance consisting of solid mechanic, electrostatic and thermoviscous acoustic interfaces. Hence, the simulated results could described the physical mechanism of the MEMS microphones, especially in the case of microphones with complex geometry. A 2-D model was used to simplify computation by applying axis symmetry condition.

The simulation results have suggested that the operating frequency range of the microphone could be extended to be operated beyond 20 kHz in the audible frequency range. The data showed that the frequency resonance of the microphone using a corrugated Si membrane with SiC as the embedded membrane is increased up to 70 kHz compared with 63 kHz for the plane Si membrane, whereas the microphone’s sensitivity is slightly decreased to −79 from −76 dB. Furthermore, the frequency resonance of a corrugated membrane microphone could be improved from 26 to 70 kHz by embedding the SiC material. Last, the sensitivity and frequency resonance value of the microphones could be modified by adjusting the height of the embedded material.

Based on these theoretical results, the proposed modification highlighted the advantages of simultaneous modifications of frequency and sensitivity that could extend the applications of sound and acoustic detections in the ultrasonic spectrum with an acceptable performance compared with the typical state-of-the-art Si condenser microphones.